Coorstek 001M: Tescan S8252G Raman-SEM/FIB

The TESCAN S8252G is an ultra-high resolution variable pressure Schottky field emission scanning electron microscope/Ga+ focused ion beam instrument for imaging and sample milling and W, Pt, and Co deposition (GIS) capabilities. It is equipped with WITec in situ confocal Raman imaging at 532 nm and 785 nm excitation wavelengths using a 100x objective, NA = 0.75.  The SEM/FIB has an Everhart-Thornley detector, two retractable backscatter detectors (one water-cooled), an in-beam multi-detector, in-beam axial detector, and secondary ion detector.  The instrument is also capable of 3-D imaging using any of the detectors.

Nanoscale compositional analysis may be performed with an EDAX Octane Elect Plus (30mm2) energy dispersive X-ray spectroscopy (EDS) system with APEX software.

The EDAX Velocity™ Pro EBSD camera offers high-speed electron backscatter diffraction (EBSD) mapping (up to 2500 pps) using a CMOS sensor and can be used in combination with the EDS detector for simultaneous EDS-EBSD data collection.

In situ manipulation for TEM foil extraction is performed using a SmarAct nano-manipulator, with 1 nm positioning resolution and an electron flood gun for charge neutralization during ion beam milling of non-conductive samples.

The Gatan Murano heating stage allows for in situ analysis from room temperature to 950° C.

• SEM Resolution: 0.9 nm at 15 kV (at 1 mm WD)
• Ga Source Focused Ion Beam (FIB) – 0.5 kV to 30 kV, up to 100nA
• Optical resolution: diffraction limited lateral typ. 430 nm @ 532 nm excitation wavelength
• 532 nm, 75 mW diode-pumped solid state laser
• 785 nm, 125 mW diode laser
• Fully motorized, heavy-duty compucentric 5-axis cradle stage (X=256mm, Y=152mm, Z=52mm, Rotation=360°, Bidirectional tilt = –3° to 60°, 8kg weight capacity

In-Situ Tensile and Compression Testing Module – Kammrath and Weiss Technologies, Inc.

• Designed to operate at loads up to 10kN while maintaining extremely low flexure
• Sample dimensions of 50mm to 60mm, overall length (including the flats for clamping) and up to 10mm width.
• Displacement speed of 0.1 to 20μm/s
• Displacement range up to 60mm, with a resolution of 100nm
• Adaptation allows for use with EBSD measurement as well

This instrument was acquired through the support of the National Science Foundation (DMR-1828454).  The EBSD detector was funded through an ONR-DURIP grant.