Coorstek 001J: FEI Helios NanoLab 600i FIB/SEM
From Anne Steputis
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From Anne Steputis
The Helios NanoLab 600i is a SEM/FIB DualBeam workstation with a Ga ion column for imaging and sample milling and Pt deposition (GIS) capability. Nanoscale chemical analysis may be performed with an EDAX energy dispersive X-ray spectroscopy (EDS) system. The instrument is also outfitted with an electron backscattered diffraction (EBSD) system, which allows for crystallographic determination on the nanoscale, and, along with imaging capabilities, 3-D reconstructions of the material composition and crystallography. In situ manipulation for TEM foil extraction is performed using an Omniprobe Autoprobe 200 nano-manipulator, with 10 nm positioning resolution.