Coorstek 001J: FEI Helios NanoLab 600i FIB/SEM

The Helios NanoLab 600i is a SEM/FIB DualBeam workstation with a Ga ion column for imaging and sample milling and Pt deposition (GIS) capability. Nanoscale chemical analysis may be performed with an EDAX energy dispersive X-ray spectroscopy (EDS) system. The instrument is also outfitted with an electron backscattered diffraction (EBSD) system, which allows for crystallographic determination on the nanoscale, and, along with imaging capabilities, 3-D reconstructions of the material composition and crystallography. In situ manipulation for TEM foil extraction is performed using an Omniprobe Autoprobe 200 nano-manipulator, with 10 nm positioning resolution.

• Schottky Field Emission Cathode
• Resolution: 0.9 nm at 15 kV (at eucentric WD); 1.4 nm at 1 kV (at optimum WD)
• Ga Source Focused Ion Beam (FIB) – 0.5 kV to 30 kV
• Platinum Deposition (GIS) System
• Secondary (SEI) and Backscatter (BEI) Imaging
  • In-lens SE detector (TLD-SE)
  • In-lens BSE detector (TLD-BSE)
  • Everhardt-Thornley SE
  • Solid-state BF and DF STEM detector
• AutoFIB, AutoTEM, Slice and View, and EBS3 Software
• EDAX “Octane Super” SDD Energy Dispersive Spectroscopy of X-rays (EDS)
• EDAX “Hikari Super” 1400pps Electron Backscatter Diffraction (EBSD) detector
• EDAX TEAM software
• Omniprobe Autoprobe™ 200 Nano-manipulator